Semiconductor devices. Mechanical and climatic test methods - Internal moisture content measurement and the analysis of other residual gases1 Scope This International Standard specifies the testing and measurement of water vapour and other gas content of the atmosphere inside a metal or ceramic hermetically sealed device. The test is used as a measure of the quality of the sealing process and to provide information about the long term chemical stability of the atmosphere inside the package. It is applicable to semiconductor devices sealed in such a manner but generally only used for high

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Normative references in Clause 2 have been updated

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correction or amendment of specific information

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