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Evaluation of thickness, density and interface width of thin films by X-ray reflectometry. Instrumental requirements, alignment and positioning, data collection, data analysis and reporting
Description
Evaluation of thickness, density and interface width of thin films by X-ray reflectometry. Instrumental requirements, alignment and positioning, data collection, data analysis and reportingWhat is ISO 16413 about? ISO 16413 is an international standard that discusses the evaluation of thickness, density and interface width of thin films by X ray reflectometry. ISO 16413 specifies a method for the evaluation of thickness, density and interface width layer and multi layered thin films which have a thickness between approximately 1nm and 1 m, on flat substrates, using X Ray Reflectometry (XRR). ISO 16413 uses a monochromatic, collimated
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